[Conference] IIT 2022 – Presentation

[Conference] IIT 2022 – Presentation

San Diego, USA
26th September 2022

<Oral presentation at The International Conference on Ion Implantation Technology (IIT) 2022>

Authors: Seunghun Baik, Heejae Jeong, and Hyuk-Jun Kwon

Presenter: Seunghun Baik

Title: “Nanosecond Pulsed Laser Activation of Phosphorus in Germanium,”¬†

Session: ‘MO5-Novel Annealing Processes and Techniques’

Date & Time: 17:30-18:00 / September 26, Monday