[Conference] ENGE 2022 – Invited Presentation Jeju, South Korea 9th November 2022 <Invited Presentation at The 7th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2022> Speaker: Prof. Kwon, Hyuk-Jun Title: “Area-Selective and Shallow Surface Treatment for 3-Dimensional Heterogeneous Integration“ Session: ‘01. Advanced Logic Semiconductors & Beyond CMOS Applications / 1-2. 3D Heterogeneous Integration for Advanced Packing’ Date & Time: 11:10-11:40 / November 9, Wednesday