[Conference] IIT 2022 – Presentation San Diego, USA 26th September 2022 <Oral presentation at The International Conference on Ion Implantation Technology (IIT) 2022> Authors: Seunghun Baik, Heejae Jeong, and Hyuk-Jun Kwon Presenter: Seunghun Baik Title: “Nanosecond Pulsed Laser Activation of Phosphorus in Germanium,” Session: ‘MO5-Novel Annealing Processes and Techniques’ Date & Time: 17:30-18:00 / September 26, Monday