[Conference] KCS 2023 – Presentation

<Poster presentation at the 30^th Korean Conference on Semiconductors (KCS), 2023>

• Authors: Seunghun Baik, Hyeokjin Kwon, Jieun Lee, Hyeongtae Lim, Geuntae Park, Gyuwon Yang, and Hyuk-Jun Kwon
• Presenter: Seunghun Baik
• Title: “Activation of Phosphorus in Germanium by Nanosecond Laser,” WP1_228
• Session: ‘F. Silicon and Group-IV Devices and Integration Technology’
• Date & Time: February 15, Wednesday / 14:00 ~ 15:45

• Authors: Heejae Jeong, Y.S. Kim, Bongho Jang, Junil Kim, Chong-Myeong Song, Sehee Kim, and Hyuk-Jun Kwon
• Presenter: Heejae Jeong
• Title: “Uniform High-Concentration Phosphorus Doping in Germanium using Hydrogen Plasma Treatment and Enhanced Plasma Delta Doping Process,” WP1_230
• Session: ‘F. Silicon and Group-IV Devices and Integration Technology’
• Date & Time: February 15, Wednesday / 14:00 ~ 15:45