[Patent] Korean Patent Pending (Application No. 2024-0139319)
[Patent] Korean Patent Pending (Application No. 2024-0139319)
14th October 2024
<Korean Patent Pending>
Title: “Method for Manufacturing a Ferroelectric Field-Effect Transistor using Laser Annealing of Dielectric and Channel Thin Films for Activation of a Monolithic 3D Stacked Structure-Based Field-Effect Transistor”
Inventors: Hyuk-Jun Kwon, Jae Eun Jang, Dongsu Kim, and Heejae Jeong