[Patent] US Patent (Application No. 16,578,985 / Patent No. 10,714,345)

<US Patent>

• Title: Plasma Assisted Doping on Germanium
• Inventors: Yunsang Kim and Hyuk-Jun Kwon
• Application No. 16,578,985
• Patent No. 10,714,345
• Patent Date: July 14, 2020