[Published Paper] IEEE Electron Device Letters 19th June 2022 <Published Paper – IEEE Electron Device Letters> Authors: Heejae Jeong*, Y.S. Kim*, Seunghun Baik , Hongki Kang, Jae Eun Jang, and Hyuk-Jun Kwon* Title: “High and Uniform Phosphorus Doping in Germanium Through a Modified Plasma Assisted Delta Doping Process with H2 Plasma Treatment” Journal: IEEE Electron Device Letters (IF: 4.221, 82.14%, JCR 2019Y) Volume (Year): 43 (2022) Pages: 1315-1318